Abstract
Структурные и микроструктурные свойства тонких пленок ZnO, полученных методом спрей-пиролиза
Highlights
The zinc oxide (ZnO) is a semiconductor of n-type conductivity with a high value of direct band gap (3,37 eV at T = 300 K) and the highest exciton building energy (60 meV) among binary compounds [1, 2]
The main goal of this work is to study the influence of substrate temperature on the structural and microstructural properties of ZnO thin films deposited by spray pyrolysis
In the diffractograms the line was dominant in the angles of 36,16°...36,32°, which corresponded to the reflection from the plane (101) of the hexagonal phase of ZnO
Summary
The zinc oxide (ZnO) is a semiconductor of n-type conductivity with a high value of direct band gap (3,37 eV at T = 300 K) and the highest exciton building energy (60 meV) among binary compounds [1, 2] This material due to its unique physical, electrical and optical properties, chemical and thermal stability of the atmosphere and non-toxicity is very promising to be used in micro- and nanoelectronics [3, 4], optoelectronics [5, 6], sensorics [7...10], solar energy engineering [11...13]. For zinc oxide thin films synthesis a wide range of techniques that include magnetron sputtering [17, 18], chemical vapor deposition [19], thermal evaporation [20], chemical bath deposition [21, 22], spray pyrolysis [23...26] is used In comparison with these methods, spray pyrolysis is simple, relatively inexpensive, non-vacuum deposition method for dense, porous thin film coatings and nanostructures of large area on different substrates. The main goal of this work is to study the influence of substrate temperature on the structural and microstructural properties of ZnO thin films deposited by spray pyrolysis
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