Кинематический расчет элементов микрозеркал микроэлектромеханических систем (MEMS)

Abstract

Currently, the development and application of micro machines is an important direction in the development of microelectromechanical systems (MEMS) technologies. In these devices, electromechanical energy conversion occurs, as a result of which forces arise that carry out mechanical work within the dimensions of the microcircuit case. The paper considers the kinematic calculation of the design of a micromirror with a reflective layer of high optical quality of the surface for deflecting the reflected laser beam. By changing the angle of inclination of the micromirror, the laser beam enters the various input channels of the optical sensor. In this case, a control signal is generated for the further operation of the microcircuit. Thus, the micromirror performs the function of a switch of input optical channels, connecting in various combinations certain input or output elements of the microcircuit for further processing. The article presents the calculation of the kinematic parameters of the mechanical structure of the micro mirror. Practical recommendations are given for choosing the optimal range of variation of the micro mirror tilt angles in order to increase the strength of its structure, as well as to reduce the power of the mechanical drive of the micro machine required to change the micro mirror tilt angles