Abstract
Micro-injection molding and microfluidic devices with the help of MEMS technologies including the LIGA process are expected to play important roles in micro-system industries, in particular the bio-application industry, in the near future, Understanding fluid flows in micro-channels is important since micro-are typical geometry in various microfluidic devices and mold inserts for micro-injection molding. In the present study, Part I, an experimental investigation has been carried out to understand the detailed flow phenomena in micro-channel filling process. Three sets of micro-channels of different thickness (40um, 30um and 20um) were fabricated using SU-8 on silicon wafer substrate, And a flow visualization system was developed to observe the filling flow into the micro-channels. Experimental flow observations are extensively made to find the effects of pressure, inertia force, viscous force and surface tension. A dimensional analysis for experimental results was carried out and several relationships of dimensionless parameters are obtained.<br/>
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