Abstract
Piezoresistive type contact force sensor array is fabricated by (111) Silicon bulk micromachining for continuous blood pressure monitoring. Length and width of the unit sensor structure is <TEX>$200{\mu}m$</TEX> and <TEX>$190{\mu}m$</TEX>, respectively. The gap between sensing elements is only <TEX>$10{\mu}m$</TEX>. To achieve wafer level packaging, the sensor structure is capped by PDMS soft cap using wafer molding and bonding process with <TEX>$10{\mu}m$</TEX> alignment precision. The resistance change over contact force was measured to verify the feasibility of the proposed sensor scheme. The maximum measurement range and resolution is 900 mm Hg and 0.57 mm Hg, respectively.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
