용량형 마이크로 공진기의 주파수 응답 보상 기법

Abstract

This paper presents frequency response compensation technique, and a self-oscillation circuit for capacitive microresonator with the compensation technique using programmable capacitor array, to compensate for the frequency response distorted by parasitic capacitances, and to obtain stable oscillation condition. The parasitic capacitances between the actuation input port and capacitive output port distort the frequency response of the microresonator. The distorted non-ideal frequency response can be compensated using two programmable capacitor arrays, which are connected between anti-phased actuation input port and capacitive output port. The simulation model includes the whole microresonator system, which consists of mechanical structure, transimpedance amplifier with automatic gain control, actuation driver and compensation circuit. The compensation operation and oscillation output of the system is verified with the simulation results.