대기압 플라즈마 전원장치의 반응기 파라메터에 관한 연구

Abstract

This paper presents a digital control solution which can extract the reactor parameters in atmosphere plasma power supply. The critical issue of the atmosphere plasma power supply is a impedance matching. For the impedance matching, the reactor parameters should be known, but the parameters depend on the reactors. Therefore, the reactor parameters have to measure for the impedance matching. The proposed method is performed by detection of phase difference between inverter voltage and current, and extraction of impedance through active, reactive power.<BR><BR>