Abstract

We have prepared a DEMO conveyor device for conveying a large 8G class glass sheet using ahorizontal air-cushion system. This device consists of the body frame and the driving frame that are combined to realize a frame for conveying glass without any contact.The driving frame comprises an air flotation table (bed), drive roller supported at both ends, and ASU. Part of the ASU serves to control the airflow as the chamber consists of a porous pad and fan. Fiber filters replace the porous pad and axial fans serve as an air compressor. In addition, to determine the appropriate glass levitation from the air table, this study examined the design specifications of the applied filter (discharge speed of HEPA and ULPA filters, and flow rate) as well as the height of the and the proper supporting roller height (14mm). Then, after adjusting the position of the ASU and the number of ASUs required to configure the UNIT air floating C/V, we analyzed the height and flatness of the glass and derived the appropriate layout (1140-mm distance between ASUs).

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