Abstract

정밀한 공정을 요구하는 반도체 및 TFT-LCD와 같은 첨단 기술산업 공장의 미진동 문제는 제품의 성능에 영향을 주는 주요한 인자로서 정밀기기 및 부품의 제조공정에 있어서 중요시 되어왔다. 본 논문에서는 이러한 첨단시설물의 미진동 문제를 해결하기 위하여 기초면진시스템의 미진동제어성능을 검토하였다. 이를 위하여, 기차에서 유발되는 인공지반운동을 생성하여 시간이력해석을 수행하였고 3층 예제구조물을 사용하였다. 수치해석을 통하여 수동 기초면진 및 스마트 면진시스템의 미진동제어성능을 고정기초구조물과 비교하였다. 그 결과 스마트 면진시스템이 미진동제어에 있어서 우수한 제어성능을 나타내는 것을 확인하였다. Microvibration problem of high-technology facilities, such as semi-conductor plants and TFT-LCD plants, has been considered as important factors that affects the performance of products and thus it is regarded as important in facilities with high precision equipments. In this paper, various base isolation control systems are used to investigate their microvibration control performance. To this end, train-induced ground acceleration is used for time history analysis and three-story example building structure is employed. Microvibration control performance of passive and smart base isolation systems have been investigated in this study. Based on numerical simulation results, it has been verified that smart base isolation system can control microvibration of a high-technology facility subjected to train-induced excitation.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.