Создание функциональных наноструктур под действием ионного облучения

Abstract

The paper describes a method developed in National Research Centre “Kurchatov Institute” for creating different functional nanostructures using ion beam irradiation. As an example, the formation of an integrated resistive elements in a low-temperature NbN superconductor nanowire is demonstrated. The possibility of producing an insulating layer of aluminum oxide with a thickness of 15 nm on the aluminum surface at room temperature under 0.2 keV oxygen ions irradiation was shown.