Abstract
The Laue diffraction theory of X-ray microbeams in multilayers
 (MLs) has been developed. The solution for calculating Xray
 reciprocal space maps has been obtained. The pendulum
 (Pendellösung) effect for perfect and imperfect MLs has been
 demonstrated. The numerical simulation of Laue diffraction in
 Mo/Si multilayers with boundary conditions in the case of geometrical
 optics and the Fresnel approximation has been carried
 out. For X-ray microbeams, the scattering at the edges
 of collimators and slits of the diffractometer should be taken
 into account.
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