Abstract
Abstract: In this paper, we fabricated ceramic body and sapphire wafer in order to develop a hydraulic pressure sensor with high sensitivity and high temperature stability. The sapphire wafer was adopted with a membrane of capacitance ceramic pressure sensor. The capacitance value of the sensor for the finite element analysis(FEM) showed a linear pressure characteristics. Membrane was processed with a diameter of 32.4 ㎜ and a thickness of 1 ㎜ by using alumina powders. Ceramic body was processed with a diameter 32.4 ㎜ and a thickness 5 ㎜. The capacitance pressure sensor was made with high heat treatment of the ceramic body and the sapphire wafer. Initially capacitance of the pressure sensor was 50 pF and a capacitance of 110 pF was measured from 5 bar pressure. Output voltage of 5 V was appeared at 5 bar pressure. Keywords: Hydraulic pressure sensor, Capacitance type, Sapphire, Ceramics, Brazing1. 서 론 저항형으로 크게 구분된다 최근 의료용 및 산업용에 사용되는 고감도, 고정밀 압력트랜스미터(pressure transmitter)의 핵심부품인 압력센서소자(pressure sensor element)에 관한 상용화 연구가 활발하게 진행되고 있다 [1,2]. 일반적으로 압력 센서는 외부 압력에 의한 멤브레인의 휨 정도가 달라짐을 이용하는 정전용량식과 멤브레인 위에 위치한 저항체가 응력에 따라 저항값이 바뀌게 됨을 이용하는 압
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