Abstract
This paper presents a novel method for designing a active vibration isolation system (AVIS) by noninteracting control theory. In the result, the designed system can effectively reject the impact of disturbances on high precision fabrication table. In particular, the authors provide a noninteracting control scheme to decrease and delete the interactions appeared in the controlled system dynamics such that the control performance can be improved. For designing an optimal servo system, the LMI (linear matrix inequality) approach is introduced. To verify the effectiveness of the proposed method, a simulation is performed. In the result, the vibration suppression performance is significantly improved, thereby enabling higher precision works.
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