반사형 마이크로미러와 듀얼 코어 클리메이터를 이용한 광 마이크로폰

Abstract

An optical microphone based on a dual-core fiber collimator and a membrane type micromirror serving as an optical head and a reflective diaphragm respectively was implemented. The micromirror diaphragm is suspended by a thin silicon bar linked with a frame, thus it is subject to a displacement induced by acoustic waves. The optical head incorporating two collimators integrated in a single housing gives light to and receives it from the diaphragm, rendering the optical microphone structure simple and compact. This dual-core collimator having a slowing varying beam profile facilitates the initial alignment of the optical head with the diaphragm, especially the distance between them. For the assembled microphone, the static characteristics were investigated tofind the operation point defined as the optimum distance between the head and the diaphragm, and a frequency response with a variation of about 5 dB for the range of up to 3kHz was achieved.