이류체 노즐 분무 해석을 위한 분열모델 상수 최적화 연구

Abstract

Over the past few decades, investigations on a dual-fluid nozzle for a wafer cleaning process have been actively conducted. Especially, developments of the dual-fluid nozzle using a numerical analysis is attracting many researchers. Breakup model constants, however, must be determined precisely to perform the numerical analysis of the dual-fluid nozzle. To select the suitable breakup model constants, validation study with experiments should be carried out. In this paper, optimization using a multi-objective genetic algorithm (MOGA) was conducted to determine the most suitable breakup model constants to use the discrete phase model (DPM) during the numerical analysis. Then, experimental results using a phase doppler particle analyzer (PDPA) were compared to validate the numerical analysis. For the design parameters, the sheet, ligament, droplet diameter, and breakup time constant, were selected. Also, the Sauther mean diameter (SMD) and mean velocity of the droplets were considered as objective functions. Consequently, the most suitable values of the sheet ligament, droplet diameter and breakup time constants were predicted to be 1.8645, 10.142, 1.4922, and 23.101, respectively.