Abstract
In this paper, we designed micro-structured electromagnetic transducers for energy harvesting and verified the performance of proposed transducers using finite element analysis software, COMSOL Multiphysics. To achieve higher energy transduce efficiency, around the magnetic core material, three-dimensional micro-coil structures with high number of turns are fabricated using semiconductor fabrication process technologies. To find relations between device size and energy transduce efficiency, generated electrical power values of seven different sizes of transducers (, , , , , , and ) are analyzed on various magnetic flux density environment ranging from 0.84 T to 1.54 T and it showed that size of device can generate at the 8 Hz of environmental kinetic energy. Compare to other electromagnetic energy harvesters, proposed system showed competitive performance in terms of power generation, operation bandwidth and size. Since proposed system can generate electric power at very low frequency of kinetic energy from typical life environment including walking and body movement, it is expected that proposed system can be effectively applied to various pervasive computing applications including power source of embodied medical equipment, power source of RFID sensors and etc. as an secondary power sources.
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