Abstract
We present a novel microcantilever device with nano-interdigitated electrodes (nano-IDEs) and DNA selective immobilization on the nano-IDEs for biosensing applications. Using the nano-IDEs and cyclic voltammetric methods, we have achieved selective immobilization of DNA with submicrometer spatial resolution on a freestanding microcantilever. 70~500 ㎚-wide gold (Au) nano-IDEs are fabricated on a lowstress SiNx microcantilever with dimensions of 100~600 ㎛ in length, and 15~60 ㎛ in width, with a 0.5 ㎛ thickness using electron beam lithography and bulk micromachining. Streptavidin is selectively deposited on one side of the nano-IDEs using cyclic voltammetry at a scan rate of 0.1 V/s with a range of -0.2~0.7 V during 1~5 cycles. The selective deposition of dsDNA is confirmed by fluorescence microscopy after labeling with YOYO-1 dye.
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