Abstract

Using the electron-ion-plasma additive method, the HEA film formed on a substrate (AISI 304 steel) was saturated with boron by vacuum deposition from gas-metal plasma created by simultaneous independent vacuum arc discharge evaporation of the cathodes of selected elements in the plasma-assisted mode. Doping of HEAs with boron and oxygen atoms, as well as with substrate atoms has been revealed. It is shown that the multicycle modification of the HEA film is accompanied by the formation of a nanostructured multiphase layer with a thickness of 5-7 µm, containing inclusions of borides and oxides of the HEA chemical elements and the substrate. It has been established that the modification of the HEA film leads to a multiple (by 18 times) decrease in the wear parameter of the material.

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