Abstract
The increase of energetic efficiency in plane bearing is getting more important in the transfer mechanism of semi-conductor and display panel manufacturing processes. To accomplish this objective, the technique of surface texturing on bearing surface has recently emerged as one of the most effective candidates. In this study, the effects of various pattern parameters on two bearing performance indices(load carrying capacity and effective friction coefficient) are investigated through a semi-analytic method, i.e., the 2-dimensional Reynolds equation incorporated into the finite difference scheme. Here, cavitation effect is also taken into account by employing an appropriate numerical scheme. In this study, the patterns in the textured surface are composed of a series of semi-spheres or semi-ellipsoids in shape. The effects of their size and number density on the performance indices are examined through the performance of various numerical experiments. Also, the effects of the anisotropy of the semi-ellipsoidal pattern on the bearing`s lubrication characteristics are investigated and discussed.
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