Abstract
Detection of dangerous gases and vapors is relevant both at work and in everyday life. Sensorelements based on semiconductor structures are highly sensitive to gases of a very differentnature. To increase the accuracy of measurements, calibration and the speed of concentrationdetermination, special methods are required, such as signal processing in various ways. The studyuses gas sensors based on silicon–carbon films that are sensitive to a whole set of gases. In thefirst part of the article, general problems and a method for solving them are considered, whichmakes it possible to increase the selectivity of semiconductor gas sensors. The analysis of dynamicparameters, such as the first and second derivatives of the response curves, as well as the analysisof the Elovich equation is carried out. Such calibration dependences, constructed from the extremesof the derivatives and the slope coefficients of the Elovich equation, show high linearity.As a promising solution, it is proposed to use a set of calibration lines to determine the concentrationof the target gas. The developed method allows, using dynamic response parameters, to determinethe gas type and its concentration using a single sensor, also to increase the accuracy ofmeasurements, along with a reduction in detection time. The experimental results of data processingwith the determination of the gas type and its concentration using the described methodare presented. For a sensor based on silicon-carbon materials, the developed method and algorithmsmade it possible to carry out measurements using a single sensor element for a set of gases(NO2, CO, SO2) with different concentrations. At the same time, the smallest relative error did notexceed 3.6% for SO2, 2.7% for NO2, 2% for CO. The distinctive features of the developed methodare the use of several calibration lines in a multidimensional space, rather than one, as well as anoriginal algorithmic signal processing methods.
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