Abstract
The paper presents various variants of inertial MEMS sensors of tactical and navigation accuracy class used in the Russian aerospace industry. Currently, the microelectronics center of Joint Stock Company “Russian Space Systems” is carrying out a number of works on the development of technologies for group microprocessing of quartz and silicon sensitive elements for such sensors and their introduction into mass production. In this case, the main task of the study is to increase the accuracy and repeatability of the geometry of elastic suspensions of MEMS sensors. The developed technologies made it possible to ensure the formation of silicon elastic elements of MEMS accelerometers and gyroscopes with an accuracy of volumetric dimensions up to 1 micron; to increase the precision of micromachining of quartz sensitive elements by a factor of 5 in comparison with traditional technology. Currently, most of the mastered technologies are implemented in the serial production of sensitive elements of inertial MEMS sensors and are used in onboard systems of aerospace devices and vehicles.
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