Abstract
In this work we studied the direct current discharges in argon of magnetrons with metal targets. The study was performed using the emission spectrums of the discharge. It was found that when increasing the discharge current in the range of 0.5…6 A, the intensity changes of metal and argon lines have an exponential character. However, if the intensity of metal lines is approximated by an exponential with a positive exponent, then argon lines are characterized by a saturation exponential. The parameters of the approximating functions depend on the argon pressure in the form of polynomials of the first order. The above features were found when studying the magnetron discharge with copper, titanium, and molybdenum targets.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: LETI Transactions on Electrical Engineering & Computer Science
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
