Интерференционный метод контроля выпуклых гиперболических поверхностей с использованием дифракционного оптического элемента

Abstract

Interference control methods are making it possible to evaluate with high accuracy errors in the shape of the optical part surface profile. The interference pattern processing allows obtaining a map of the surface deviations at each of its points with an accuracy of half the wavelength. An interference method is proposed for testing the convex hyperbolic surfaces, which could be introduced to control mirrors with large aperture angles in the imaginary geometric focus. The proposed auto-collimation control scheme consists of a helium-neon laser with the wavelength of 632.8 nm, a meniscus lens and a planar axisymmetric diffractive optical element to correct the meniscus spherical aberration. Numerical method is presented for calculating the optical diffraction element using a phase profile on the example of the secondary hyperbolic mirror of the Millimetron space telescope. The developed scheme was simulated in the Zemax OpticStudio program. The approximation error of the calculated phase profile was evaluated depending on the number of phase coefficients. The Fizeau interferometer optical system is proposed to implement the developed method. The influence of errors in installing a controlled mirror on the interference pattern for axial displacement, transverse displacement and tilt was determined. The residual wave aberration was evaluated in the control system