Abstract
The development of a method to improve performance properties of various materials, based on the synergy of high-intensity ion implantation and simultaneous energy impact on the surface, is aimed at creating deep ion-doped layers. Repetitively-pulsed high-power density beams of metal and gas ions with submillisecond duration are required to implement this method. This article presents the results of experimental studies on the forming pulsed high-intensity titanium ion beams from vacuum arc plasma. The effect on focusing and transport efficiency of the cell sizes of the grid focusing electrode in the form of a part of a sphere has been studied. The possibility of ballistic focusing of a titanium ion beam with a pulse duration from 150 to 500 μs with a power density of up to 100 kW/cm2 has been experimentally shown.
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