Abstract
The paper proposes the use of diamond-carbide-silicon composite "Skeleton"® coated with amorphous silicon as substrates for multilayer X-ray mirrors for powerful synchrotron radiation sources (3rd+ and 4th generation). The surfaces with the following parameters were obtained using standard deep polishing methods: flatness at the level of RMS90%=54.2 nm; effective roughness sigmaeff~1.0 nm; high-frequency roughness sigma2х2~0.1 nm.
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