Abstract
The paper presents the results of experimental studies of the heating dynamics of metal-dielectric structures (MDS) with aluminum conductive nanoscale films deposited by magnetron sputtering on low-cost substrates (glass, sitall, PET and PTFE) under exposure to monochromatic ultrahigh frequency (UHF) fields in a waveguide. At film thicknesses less than 2 nm, the experimental samples had mostly dielectric properties. Noticeable interaction of the films with microwave, causing thermal phenomena, was observed at thicknesses greater than 2 nm and reached a maximum at 5 nm. Thermal degradation processes of the metallized layer manifested in different ways in MDS with solid and polymer (flexible) substrates. Breakdown in conductive films generally occurred at temperatures below the melting temperature of the film material and occurred perpendicular to the electric field strength vector.
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