Abstract
In this paper describes the process of manufacturing ohmic contacts to diamond-like carbon (DLC) layer by depositing of Au/Mo/Ti metal layers. Contacts had good mechanical and adhesive properties. Their contact resistivity ranged from 1.4 ∙ 10-4 to 6.4 ∙ 10-5 Ohm ∙ cm2 depending on the DLC layer thickness. The temperature dependence of the films sheet resistance was studied. It is shown that thin DLC layers provide better ohmic contact characteristics due to their more uniform graphitization during thermal annealing.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
