Исследование формирования многослойного функционального композиционного материала с градиентной структурой “нитрид титана – титан – основа”

Abstract

Composite materials based on aluminum alloy D16 and titanium alloy Ti – 10 Nb – 3 Mo with surface layers of titanium, titanium nitride and a multilayer composition consisting of alternating layers of titanium and titanium nitride for biomedical and tribological purposes by high-vacuum magnetron sputtering at direct current in inert and reactive media were obtained. The structure and phase composition were studied using SEM, AES, X-ray diffractometry and probe microscopy. The rate of formation of a surface layer of pure titanium on a substrate made of alloy D16 was 185 nm/min, and the rate of synthesis of a surface layer of titanium in a reactive medium was significantly slowed down and was no more than 70 nm/min due to nitrogen poisoning of the target. The transition layer formed as a result of the synthesis of a titanium layer on an aluminum alloy substrate had a thickness of about 600 nm, which is significantly greater than the thickness of the transition layer when titanium is obtained on a titanium alloy substrate. During the formation of titanium nitride on a titanium sublayer, a greater concentration of nitrogen was observed than during the formation of nitride on a substrate with the same deposition parameters. The intensity of the TiN phase reflexes in the X-ray diffractometry diagrams were weakly expressed in all variants of the applied ratios of working gases Ar/N2 during spraying. The speed of the titanium sublayer makes it possible to form a greater thickness of the titanium nitride layer than without the sublayer, as well as a more nitrogen–saturated surface layer - up to 38% by weight.