Abstract
기존의 반사형 타원계에 광분할기와 프리즘 등의 광학소자를 추가하여 <TEX>$8.0{\mu}m$</TEX> 보다 작은 면적에서 시료의 광학이방성을 측정할 수 있는 수직반사형 타원계를 제작하였다. 수직반사 구조를 구현하기 위해 사용된 광학소자들의 편광작용을 보정하여 광학이방성 측정의 정확도를 향상시켰다. 비편광 광분할기를 사용하고 사분파장 위상지연자를 장착하며 광섬유를 제거하고 파장영역을 최적화하여 광학이방성인자 측정값의 표준편차를 0.00083 으로 줄이고 방위각 변화에 따른 rutile 시료의 광학이방성인자의 변동폭을 0.015 이하로 줄일 수 있었다. A normal incidence ellipsometer is fabricated to measure the optical anisotropy of a small spot whose diameter is less than <TEX>$8.0{\mu}m$</TEX>, by adding a beam splitter and a prism to the conventional rotating analyzer type ellipsometer. The polarizing actions of the added optical components are calibrated to improve the accuracy of the anisotropy measurement. The standard deviation of the optical anisotropy factor decreased to 0.00083, and the variation of the optical anisotropy factor of rutile versus sample azimuth angle variation also decreased to 0.015, after adoption of a non-polarizing beam splitter and a quarter wavelength phase retarder, followed by removal of the optical fiber and a careful choice of measurement wavelength.
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