Дослідження вольт-амперних характеристик дротяної електронної гармати Пірса для електронно-променевої мікрообробки діелектриків

Abstract

The main energy characteristics of Pierce wire electron beam gun, which is used for treatment of dielectric materials in vacuum, are considered. The modes of operation of such a gun depending on their energy characteristics are studied. It is established that at a fixed width of the anode gap of 2.0 mm it is possible to implement the main technological modes of low-energy EBT dielectrics (including optical glass). The results of electron beam treatment of dielectrics with the results of their laser surface treatment are compared. The reduction of residual surface microroughnesses for optical glass K8 up to 26 times with EBT and up to 14 times with surface laser treatment was established. It is shown that the electron beam treatment of the tape shape, in contrast to the surface laser treatment, allows to completely eliminate the waviness of the optical surface. On the example of plates made of optical glass K8 it is proved that electron beam treatment of surfaces of dielectric materials allows to increase the reproducibility of the results of such micromachining by purity and residual nanorelief by 18 ... 25 %.