Abstract
The design features of precision contactless position sensors for the operational control of high-speed laser synthesis of micro- and nanostructures is described. As a result of software simulation of the autofocus sensor based on the asymmetry of the wave front of the probing radiation, the influence of the Foucault knife position on the working range, which can be increased 10 times, has been established. The calculation and optimization of the fiber confocal sensor based on the chromatic coding method showed that the error in determining the surface position can be reduced several times by introducing a special apodizing mask into its scheme.
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