Abstract
The article considers some regularities of the formation of niobium stannide coatings during their deposition by magnetron sputtering using a stoichiometric target. The optimal mode of operation of the magnetron source is determined, the element-phase composition, the microstructure of the formed films, as well as their change in the process of high-temperature annealing are investigated. The research results indicate that the coatings optimal in terms of elemental and phase composition were obtained in the deposition mode at an argon pressure in the working chamber of 0.3 Pa and a high-vacuum annealing temperature of 800 °C.
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