Возможности метода задающей маски для исследования характеристик планарных ВТСП-структур в зависимости от толщины сверхпроводящей пленки

Abstract

Unlike traditional methods of fabrication of the planar superconducting structures based on YBCO films, in which etching or ion implantation is used to form the topology, in the method of preliminary topology mask (TM), the topology is set at the initial stage of the structure manufacturing process, during the formation of TM, and the deposition of YBCO is its final stage. Superconducting elements of the structure are formed in the windows of the TM, and insulating regions are formed between them. In this paper, having fixed the topology of superconducting bridges at the stage of the formation of TM, we measured their characteristics depending on the thickness of the YBCO film, sequentially conducting deposition cycles. After each YBCO deposition, the structural parameters of the film as well as the critical temperature and current at the bridges, including those with Josephson contacts formed on the bicrystalline substrate, were measured.