Various non-metallic substances typically utilized in space applications were tested for their potential to build up harmful contaminant layers on laser optics. The tests were carried out in the UV spectral range at 355 nm wavelength on uncoated fused silica substrates. Online monitoring of the fluorescence emission showed that the deposits build up already within several minutes after starting the laser irradition. By ToFSIMS analysis potential contaminant breakdown products have been detected in the deposits. In a first experiment we found a reduction in the deposit formation by water.
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