The design and performance of a high repetition rate (1 kHz) and high average power (200 W) XeCl discharge pumped laser (λ=308 nm) using a cold cathode x-ray gun or a wire ion plasma gun for preionization are presented. The dependence of the output energy and of the average output power at low and high pulsed repetition frequency (PRF) on xenon partial pressure is studied. The discharge stability at high PRF is better with lower xenon partial pressure. The influence of preionization level and temporal delay between x-ray pulse and laser discharge is discussed, as well as the required preionization level at higher PRF.
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