In line with Moore's Law and the International Roadmap for Devices and Systems (IDRS), shrinking MOSFET dimensions to the 3 nm technology node requires the introduction and thorough investigation of new device structures and advanced materials. The current study focuses on the implementation of Triple Metal (TM) and Quadruple Metal (QM) gate work function engineering techniques on both junctionless (JL) and inversion mode (IM) Double surrounding Gate (DSG) In0.53Ga0.47As nanotube (NT) MOSFET. The objective is to analyze the drain current (ID) characteristics for a gate length of 3 nm using Silvaco ATLAS 3D TCAD. In order to make a fair comparison between JL and IM In0.53Ga0.47As NT, the doping concentration of TM and QM JL In0.53Ga0.47As NT is tuned to achieve two specific objectives. Firstly, the goal is to produce the same ION as IM In0.53Ga0.47As NT. Secondly, the aim is to achieve the same threshold voltage (VTH) as IM In0.53Ga0.47As NT. It was discovered that the IOFF for JL devices is approximately 2.93 times smaller compared to IM devices in the TM situation, while considering matching ION and VTH. The JL devices have an IOFF that is 12.9 times smaller and an IOFF that is 102 times smaller compared to the IM device for the QM situation. This is achieved by matching the ION and VTH values. It achieves a lesser drain-induced barrier lowering (DIBL) of approximately 28.10 mV/V, a virtually perfect subthreshold slope (SS) of roughly 60mV/dec, and a larger current ratio of ION/IOFF, which is approximately 1.42 × 107.
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