Voltage Contrast Research Articles

High-precision CD measurement using energy-filtering SEM techniques

Voltage contrast (VC) images obtained using an energy filter (EF) were used to measure the bottom surface of high-aspect-ratio structures. The VC images obtained using the conventional EF were sensitive to variations in wafer potential. Since CD-SEM metrology requires precise EF voltage control when using VC images, we developed an EF voltage correction method to be used at each measurement point. Consequently, bottom-edge measurement, independent of the wafer potential fluctuations, was achieved using the newly developed EF. Our developed technique is effective for CD-SEM metrology using VC images.

Tomography of Electrospun Carbon Nanotube Polymeric Blends by Focus Ion Beam: Alignment and Phase Separation Analysis from Multicontrast Electron Imaging

Multimodal focused ion beam (FIB) imaging on a polydimethylsiloxane/poly(methyl methacrylate) (PMMA)/multiwall carbon nanotube (MWCNT) electrospun composite has been applied to discriminate the phase‐separated polymer blend and identify MWCNT fillers. Upon tomographic reconstruction, this discrimination has been possible through both atomic number and voltage contrast, the latter being enabled by preferential MWCNT segregation to PMMA. This study suggests that electrospinning could be affecting not only MWCNT alignment but also phase separation dynamics of immiscible polymers, yielding a porous structure throughout the fibers. This work opens the door to correlative materials science in polymer nanocomposites through FIB tomography, where voltage contrast is a main actor. image

Effect of a Polymercaptan Material on the Electro-Optical Properties of Polymer-Dispersed Liquid Crystal Films.

Polymer-dispersed liquid crystal (PDLC) films were prepared by the ultraviolet-light-induced polymerization of photopolymerizable monomers in nematic liquid crystal/chiral dopant/thiol-acrylate reaction monomer composites. The effects of the chiral dopant and crosslinking agents on the electro-optical properties of the PDLC films were systematically investigate. While added the chiral dopant S811 into the PDLC films, the initial off-state transmittance of the films was decreased. It was found that the weight ratio among acrylate monomers, thiol monomer PETMP and the polymercaptan Capcure 3-800 showed great influence on the properties of the fabricated PDLC films because of the existence of competition between thiol-acrylate reaction and acrylate monomer polymerization reaction. While adding polymercaptans curing agent Capcure 3-800 with appropriate concentration into the PDLC system, lower driven voltage and higher contrast ratio were achieved. This made the polymer network and electro-optical properties of the PDLC films easily tunable by the introduction of the thiol monomers.

Effects of functionality of thiol monomer on electro-optical properties of polymer-dispersed liquid crystal films

ABSTRACTIn this paper, polymer-dispersed liquid crystal (PDLC) films which based on the acrylate and the thiol monomers were first prepared by ultraviolet-initiated polymerisation. The electro-optical properties and morphologies of the PDLC films were systematically investigated. The functionality of thiol monomers and their feed ratio showed great influence on the properties of the fabricated PDLC films because of the existence of competition between thiol–acrylate reaction and acrylate monomer polymerisation reaction. This made the polymer network and electro-optical properties of the PDLC films easily tunable by the introduction of the thiol monomers. When added four-functional thiol monomer PETMP with appropriate concentration into the PDLC system, lower driven voltage and higher contrast ratio were achieved.

The Benefits of High Landing Energy for E-Beam Inspection

E-beam inspection has become one of the most important tools for rapid yield ramp in the semiconductor industry, due to its ability to detect a wide range of defects in-line soon after their formation. This role expansion is due to the increasing difficulty in detecting defects in-line with other traditional methods as well as the continuing evolution of e-beam capability. In the last five years, the role of e-beam inspection has expanded from detection of electrically active, buried defects using voltage contrast inspection to also detection of many challenging physical defect types as well as systematic patterning defects. This paper reports on the impact of an important recent improvement in e-beam inspection tool capability, the availability of dramatically higher landing energies, and the benefits this improvement provides. These include detection of buried defects, a sharper image for detection of surface physical defects, minimization of wafer charge enabling much longer inspections, and material contrast. These advantages are illustrated through a number of examples. High landing energy can damage certain wafer surfaces and these concerns are also discussed. Overall, high landing energy is a powerful new tool in the e-beam inspection tool box which should be aggressively adopted.

Use of low tube voltage and low contrast agent concentration yields good image quality for aortic CT angiography

To evaluate the impact of a "double-low" imaging protocol (low tube voltage and low contrast agent concentration) on image quality and radiation dose for aortic computed tomography (CT) angiography (CTA). This was a prospective study of 72 patients undergoing aortic CTA. They were randomised to the double-low and conventional CT (control) groups (n=36/group). Axial imaging was performed in the study group, and control patients were scanned with the conventional protocol. Double-low parameters were: 80-100kV, 200mAs, 128×0.625 collimation, 1-mm section thickness, 0.5-mm increments, 300mm field of view (FOV), iohexol (300mg iodine/ml, 1-1.5ml/kg, injected at 4-5ml/s). Control CT parameters were: 120kV, 200-300mAs, iopamidol (370mg iodine/ml; 1-1.5ml/kg, injected at 4-5ml/s); the remaining parameters were the same as in the double-low group. Image noise and quality scores of the double-low and control groups were 15.05±1.53 versus 14.67±1.53 and 3.52±0.51 versus 3.44±0.5 (both p>0.05), respectively. Radiation dose was 56% lower in the double-low group compared to control patients (6.76±1.08 versus 15.48±1.01mSv, p<0.001). Iodine intake per-capita in the double-low group was 18% lower compared to the control group (300.25±7.2 versus 367.86±5.54 mgI/kg, p<0.001). The "double-low" technique for aortic CTA significantly reduced the doses of radiation and iodine contrast agent, while maintaining good image quality.

Mechanism and detection of poly gate leakage with nonvisual defects by voltage contrast inspection

The research aims at nonvisual defects causing the poly gate leakage failure and the corresponding inline voltage-contrast (VC) inspection. Electron beam inspection (EBI) begins to be frequently used for scanning either SRAM or DRAM cell area in nano-scaled technologies. The research, furthermore, extends EBI to logical area of an ASIC product and proposes an inline detectable methodology for gate leakages. Extreme tiny and nonvisual residues could happen during gate etch processes by the step height between active area (AA) and shallow trench isolation (STI), and the tiny defects are difficult to be located even some of those did lead to chip probe (CP) test failure. The subsequent implant processes would punch through those tiny poly residues, make the residue being conductive, and finally electrons on the gate would leak to the ground through the residue. Those nonvisual residues act as bridges for gate leakages. EBI with designed positive charging modes was applied into the series of implement steps and found the leakage by a significant voltage contrast signal post the source/drain implantation. The bright VC of the gate poly implied the leakage electrons charging on the gate. A series of process experiments based on the model for reducing leakages was tested and quickly verified by the EBI in front end of the line. An optimal process integration condition was soon carried out with a significant chip yield enhancement.

Active voltage contrast imaging of cross-sectional surface of multilayer ceramic capacitor using helium ion microscopy

We studied active voltage contrast (AVC) imaging using helium ion microscopy (HIM). We observed secondary electron (SE) images of the cross-sectional surface of multilayer ceramic capacitors (MLCCs) with and without a voltage applied to the internal electrodes. When no voltage was applied, we obtained an image reflecting the material contrast between the Ni internal electrode region and the BaTiO3 dielectric region of the cross-sectional surface of the MLCC. When a voltage was applied, the electrical potential difference between the grounded and the positively biased internal electrodes affected the contrast (voltage contrast). Moreover, attenuation of the SE intensity from the grounded to the positively biased internal electrodes was observed in the dielectric region. Kelvin probe force microscopy (KPFM) measurements of the contact potential difference (CPD) were performed on the same sample. By using the AVC image from the HIM observation and the CPD image from the KPFM measurement, we could quantitatively evaluate the electrical potential. We think that the results of this study will lead to an expansion in the number of applications of HIM.

Coronary CT angiography with 80 kV tube voltage and low iodine concentration contrast agent in patients with low body weight

BackgroundCoronary CT angiography (CTA) is gaining widespread acceptance for the non-invasive evaluation of coronary arteries. However, radiation exposure and administration of iodinated contrast agents are still reasons of some concern. The 80 kV tube voltage increases the attenuation of iodine, allowing to use lower iodine concentration contrast agents for coronary CTA. ObjectiveWe evaluated the diagnostic accuracy of coronary CTA performed with 64-slice scanner, 80 kV tube voltage, iterative reconstruction algorithm and ultra-low concentration contrast medium to reduce iodine load and radiation dose. MethodsWe enrolled 45 patients with low body weight and indication for elective invasive coronary angiography (ICA). All patients received an 80 ml bolus of Iodixanol-270 at an infusion rate of 5 mL/s and underwent coronary CTA (80 kV and 500–550 mA) with prospective ECG-triggering. Image quality score, type of artifacts, coronary CTA evaluability, diagnostic accuracy and radiation exposure were assessed. ResultsPre-test probability of CAD was low-to-intermediate (48%). Accordingly, the prevalence of obstructive CAD was 47% (21 out of 45 patients). Most (93%) of the patients were pre-treated with intravenous metoprolol before scanning and achieved a heart rate suitable for prospective ECG-triggering coronary CTA (53 ± 3 bpm). The mean effective dose and iodine load were 1.1 ± 0.4 mSv and 21.6 gI, respectively. We rated 443 out of 720 coronary segments as being of excellent image quality. In a segment-based model, coronary evaluability (number of coronary segments evaluable/total number of coronary segments), was 97% (699/720 segments). In a segment-based analysis, sensitivity, specificity, positive predictive value, negative predictive value and accuracy for >50% coronary stenosis identification vs. ICA were 89%, 99%, 89%, 99% and 99%, respectively. In a patient-based analysis, sensitivity, specificity, positive predictive value, negative predictive value and accuracy were 94%, 89%, 83%, 96% and 91%, respectively. ConclusionsIn patients with low body weight, image quality and diagnostic accuracy of ultra-low radiation dose and low-iodine load coronary CTA are good and similar to values reported in the literature for standard tube voltage and iodine load protocols.

Double-low protocol for hepatic dynamic CT scan: Effect of low tube voltage and low-dose iodine contrast agent on image quality.

The radiation-induced carcinogenesis from computed tomography (CT) and iodine contrast agent induced nephropathy has attracted international attention. The reduction of the radiation dose and iodine intake in CT scan is always a direction for researchers to strive. The purpose of this study was to evaluate the feasibility of a “double-low” (i.e., low tube voltage and low-dose iodine contrast agent) scanning protocol for dynamic hepatic CT with the adaptive statistical iterative reconstruction (ASIR) in patients with a body mass index (BMI) of 18.5 to 27.9 kg/m2.A total of 128 consecutive patients with a BMI between 18.5 and 27.9 kg/m2 were randomly assigned into 3 groups according to tube voltage, iodine contrast agent, and reconstruction algorithms. Group A (the “double-low” protocol): 100 kVp tube voltage with 40% ASIR, iodixanol at 270 mg I/mL, group B: 120 kVp tube voltage with filtered back projection (FBP), iodixanol at 270 mg I/ mL, and group C: 120 kVp tube voltage with FBP, ioversol at 350 mg I/ mL.The volume CT dose index (CTDIvol) and effective dose (ED) in group A were lower than those in group B and C (all P < 0.01). The iodine intake in group A was decreased by approximately 26.5% than group C, whereas no statistical difference was observed between group A and B (P > 0.05). There was no significant difference of the CT values between group A and C (P > 0.05), which both showed higher CT values than that in group B (P < 0.001). However, no statistic difference was observed in the contrast-to-noise ratio (CNR), the signal-to-noise ratio (SNR), and image-quality scores among the 3 groups (all P > 0.05). Near-perfect consistency of the evaluation for group A, B, and C (Kenall's W = 0.921, 0.874, and 0.949, respectively) was obtained by the 4 readers with respect to the overall image quality.These results suggested that the “double-low” protocol with ASIR algorithm for multi-phase hepatic CT scan can dramatically decrease radiation dose and iodine intake with adequate image quality in patients with BMI of 18.5 to 27.9 kg/m2.

Cerebral CTA with Low Tube Voltage and Low Contrast Material Volume for Detection of Intracranial Aneurysms.

Multidetector row CTA has become the primary imaging technique for detecting intracranial aneurysms. Technical progress enables the use of cerebral CTA with lower radiation doses and contrast media. We evaluated the diagnostic accuracy of 80-kV(peak) cerebral CTA with 30 mL of contrast agent for detecting intracranial aneurysms. Two hundred four patients were randomly divided into 2 groups. Patients in group A (n = 102) underwent 80-kVp CTA with 30 mL of contrast agent, while patients in group B (n = 102) underwent conventional CTA (120 kVp, 60 mL of contrast agent). All patients underwent DSA. Image quality, diagnostic accuracy, and radiation dose between the 2 groups were compared. Diagnostic image quality was obtained in 100 and 99 patients in groups A and B, respectively (P = .65). With DSA as reference standard, diagnostic accuracy on a per-aneurysm basis was 89.9% for group A and 93.9% for group B. For evaluating smaller aneurysms (<3 mm), the diagnostic accuracy of groups A and B was 86.3% and 90.8%, respectively. There was no difference in diagnostic accuracy between each CTA group and DSA (all, P > .05) or between the 2 CTA groups (all, P > .05). The effective dose in group A was reduced by 72.7% compared with group B. In detecting intracranial aneurysms with substantial radiation dose and contrast agent reduction, 80-kVp/30-mL contrast CTA provides the same diagnostic accuracy as conventional CTA.

Impact of Knowledge-Based Iterative Model Reconstruction in Abdominal Dynamic CT With Low Tube Voltage and Low Contrast Dose.

The purpose of this study was to compare iterative model reconstruction (IMR) and hybrid iterative reconstruction (HIR) of 80-kVp abdominal dynamic CT scans obtained with a low-dose contrast agent. A group of 27 consecutively registered patients underwent abdominal dynamic CT with an 80-kVp protocol and a low dose of contrast agent (300 mg I/kg). Another 27 patients who had previously undergone a 120-kVp protocol with filtered back projection (FBP) and a standard contrast dose (600 mg I/kg) acted as control subjects. Effective dose, image noise, CT number, and contrast-to-noise ratio were compared between the 120-kVp and 80-kVp images with FBP, HIR, and IMR. Image contrast, image noise, image sharpness, noise texture, and overall image quality were evaluated for the four protocols. The effective dose of the 80-kVp protocol was lower than that with the 120-kVp protocol. The 80-kVp protocol with HIR and IMR decreased image noise by 45% and 70% compared with the 80-kVp protocol with FBP. The contrast-to-noise ratio of the 80-kVp protocol with IMR was higher than that of the 120-kVp protocol. Qualitatively, the 80-kVp protocol with IMR improved image noise more than the 120-kVp protocol did, but noise texture was worse. HIR and the 120-kVp protocol yielded similar subjective image quality. Use of the 80-kVp protocol with HIR allowed an approximately 50% reduction in contrast dose and an approximately 40% reduction in radiation dose compared with use of the 120-kVp protocol while preserving image quality. IMR reduced image noise more than HIR with this protocol but worsened noise texture.

Coronary Computed Tomographic Angiography at Low Concentration of Contrast Agent and Low Tube Voltage in Patients with Obesity:: A Feasibility Study

Using lower tube voltage can reduce the exposure to radiation and the dose of contrast agent. However, lower tube voltage is often linked to more noise and poor image quality, which create a need for more effective technology to resolve this problem. To explore the feasibility of coronary computed tomographic angiography (CCTA) in patients with obesity at low tube voltage (100 kV) and low contrast agent concentration (270 mg/mL) using iterative reconstruction. A total of 48 patients with body mass index greater than 30 kg/m(2) were included and randomly divided into two groups. Group A received a traditional protocol (iopromide 370 mg/mL + 120 kV); group B received a protocol with low tube voltage (100 kV), low contrast agent concentration (270 mg/mL), and iterative reconstruction. The effective dose (ED), average attenuation values, signal-to-noise ratio (SNR), contrast-to-noise ratio (CNR), the figure of merit (FOM), image quality scores, and the total iodine intake were compared. No significant differences in average CT attenuations, SNR, CNR, and subjective scores were noticed between the two groups (P > 0.05), whereas the FOM of group B was significantly higher than that of group A. Effective radiation dose, total iodine, and iodine injection rate in group B were lower than those of group A (P <0.01). In patients with obesity, isotonic contrast agent with low iodine concentration and low-dose CCTA were feasible. Substantial reduction in radiation dose and the iodine intake could be achieved without compromising the image quality.

Full-Wafer Voltage Contrast Inspection for Detection of BEOL Defects

This paper details an application where E-beam inspection (EBI) can be used for 100% full wafer inspection, generally considered a mythical target for EBI. For process layers where the line-widths and defects of interest are large, very large pixel size and high scan frequency can be used, thereby making full wafer inspection feasible. The metal layers in the back-end-of-line fit this bill when scanned in voltage contrast (VC) mode. Shorts or opens at any previous layer connected to the surface nodes can cause a VC signal, therefore the electrical health of each wafer is assessed for multiple layers simultaneously across the full wafer. The advantage of this scan is that failure sites can be identified and somewhat localized well before wafer final test. This application is more appropriate for semi-mature technologies where there are few defects per wafer, and therefore a full wafer scan is needed to catch a reasonable number of defects. The challenge with this type inspection is in identification of the root cause. A number of studies to map VC defect strength to types of physical defects are described. These studies demonstrated that this technique successfully finds yield limiting defects, but not all yield limiting defects will be detected. A plan for how to use the VC inspection to find root cause is presented.

Voltage contrast X-ray photoelectron spectroscopy reveals graphene-substrate interaction in graphene devices fabricated on the C- and Si- faces of SiC

We report on an X-ray photoelectron spectroscopy (XPS) study of two graphene based devices that were analyzed by imposing a significant current under +3 V bias. The devices were fabricated as graphene layers(s) on hexagonal SiC substrates, either on the C- or Si-terminated faces. Position dependent potential distributions (IR-drop), as measured by variations in the binding energy of a C1s peak are observed to be sporadic for the C-face graphene sample, but very smooth for the Si-face one, although the latter is less conductive. We attribute these sporadic variations in the C-face device to the incomplete electrical decoupling between the graphene layer(s) with the underlying buffer and/or substrate layers. Variations in the Si2p and O1s peaks of the underlayer(s) shed further light into the electrical interaction between graphene and other layers. Since the potential variations are amplified only under applied bias (voltage-contrast), our methodology gives unique, chemically specific electrical information that is difficult to obtain by other techniques.

The formation of supramolecular liquid-crystal gels for enhancing the electro-optical properties of twisted nematic liquid crystals

We report that the supramolecular liquid-crystal (LC) physical gel can be formed through the fibrous self-assembly of the polyfluorene-based π-conjugated polymer, poly(9,9-dioctylfluorene-alt-benzothiadiazole) (F8BT), in twisted nematic LC system for the first time. With the utility of alignment layers, the F8BT molecules can be aligned and formed the LC physical gels with the formation of self-assembled supramolecular structures in the twisted nematic LCs. In contrast to conventional LC physical gels, the presence of anisotropic π-conjugated structure makes the twisted nematic LC system exhibit excellent electro-optical properties of driving voltage reduction and contrast ratio enhancement owing to the conjugated polymer having a high π-electron delocalization degree which can efficiently drive LC molecules in much lower operating voltages. The self-assembled supramolecular network has revealed the potential for applying in various LC display devices with the ability of improving their electro-optical performance.

Reversing stealthy dopant-level circuits

A successful detection of the stealthy dopant-level circuit (trojan), proposed by Becker et al. at CHES 2013 (LNCS 8086:197–214, 2013), is reported. Contrary to an assumption made by Becker et al. dopant types in active region are visible with either scanning electron microscopy (SEM) or focused ion beam (FIB) imaging. The successful measurement is explained by a technique called the passive voltage contrast (Rosenkranz J Mater Sci Mater Electron 22(10):1523–1535, 2011) which is used to analyze failures in large-scale integration (LSI). The experiments are conducted by measuring a dedicated chip. The chip uses the diffusion programmable device (Shiozaki et al. Diffusion programmable device: a device to prevent reverse engineering, IACR Cryptology ePrint Archive 2014/109 2014): an anti-reverse engineering technique by the same principle as the stealthy dopant-level trojan. The chip is delayered down to the contact layer, and images are taken with (1) an optical microscope, (2) SEM, and (3) FIB. As a result, the four possible dopant–well combinations, namely (i) p+/n-well, (ii) p+/p-well, (iii) n+/n-well and (iv) n+/p-well are distinguishable in the SEM images. Partial but sufficient detection is also achieved with FIB. Although the stealthy dopant-level circuits are visible, they potentially make a detection harder. That is because the contact layer should be measured. We show that imaging the contact layer is at most 16 times more expensive than that of a metal layer in terms of the number of images.

Electro-Optical Properties of Robust Flexible VA LCDs Using Polymerization Induced Phase Separation

We developed flexible VA LCDs with high electro-optical performance and thermal reliability for flexible display applications. It was achieved by applying the precise control of phase separation, forming well defined cylindrical liquid crystal domains surrounded by polymer matrix. The LC domains have uniform size and the LC molecules inside the domains were well aligned through the contact to vertical alignment layers coated on plastic substrates, so that low driving voltage, high transmittance and high contrast ratio were achieved. We fabricated 5-inch flexible VA LCD panel, showing good electro-optical properties and high mechanical stability.

Preliminary study of improved quality of computed tomographic angiography on tumor blood supply arteries of gastrointestinal tract malignant tumors with low tube voltage and low concentration contrast medium

To assess the image quality of gastrointestinal tract malignant tumors arteries using low tube voltage, low contrast medium concentration and 50% adaptive statistical iterative reconstruction (ASiR) algorithm. A total of 58 patients with pathologically confirmed gastrointestinal tract malignant tumors and body mass index (BMI) under 22 kg/m² undergoing computed tomography (CT) scanning during March-December 2013. They were randomly divided into group A (270 mgI/ml of contrast medium, 80 kVp tube voltage scanning and 50% ASiR; 21 males and 11 females with an age range of 40-90 years) and group B (350 mgI/ml of contrast medium, 120 kVp routine tube voltage; 22 males and 4 females with an age range of 40-76 years). The inter-group differences of age and gender ratio were compared with Mann-Whitney U and Fisher exact tests respectively. Two independent radiologists reviewed reconstructions and separated the reconstructed image into 5 points according to image quality. The CT value of tumor blood supplying artery (CT1 value) and fat in anterior abdominal wall (SD value) were measured and image noise, contrast-to-noise ratio (CNR) and figure of merit (FOM) calculated. The interobserver variation was estimated by weighted kappa statistics and intra-class correlation coefficients (ICC) test. The point of image quality of two groups was compared by Mann-Whitney U test. The paired Student t test was used to compare the inter-group differences in CT1, SD, CNR, FOM and CT dose index (CTDIvol). No inter-group difference existed in patient age or gender ratio. The consistency of two radiologists was excellent (kappa value > 0.80; ICC value > 0.75). The subjective image quality scores of tumor blood supplying arteries showed no inter-group difference (P = 0.09). The tumor blood supply arteries CT value, CNR and FOM of group A (459 ± 69 HU, 20.2 ± 3.3 and 85 ± 37) were significantly higher than those of group B (250 ± 42 HU, 9.3 ± 1.9 and 9 ± 4) (both P < 0.01). The SD value of group A (20.0 ± 1.7) was obviously lower than that of group B (22.4 ± 3.2) (P < 0.01). And the CTDIvol of group A (5.2 ± 1.2 mGy) was obviously lower than that of group B (13.5 ± 4.7 mGy) (P < 0.01). For patients of BMI ≤ 22 kg/m², low tube voltage and low contrast medium concentration scan condition with 50% ASiR algorithm is feasible for acquiring better quality image and ensuring significant reduction in effective dose.

Application feasibility of low tube voltage and lower iodine concentration contrast medium as well as iterative reconstruction in coronary computed tomography angiography

To investigate the feasibility of using lower iodine concentration (270 mgI/ml) contrast medium, lower X-ray tube voltage (100 kVp) and iterative reconstruction (IR) to reduce both iodine load and radiation dose but keep the image quality of coronary CT angiography (CCTA). A total of 80 consecutive patients with suspected coronary artery disease were prospectively assigned to one of two groups via computer central system from January to May 2013. The control group (n = 40) was scanned using dual-source CCTA protocols of 120 kV, 370 mgI/ml Iopromide and filtered back projection reconstruction with a vascular algorithm (B26f). The study group (n = 40) was scanned using 100 kV, 270 mgI/ml Iodixanol and sinogram affirmed iterative reconstruction with a vascular algorithm (I26f). Other scan parameters and contrast injection protocol were similar between the two groups. Attenuation in the ascending aorta and coronary arteries along with image noise were measured. Images were reconstructed, measured and graded, and iodine load and effective radiation dose were calculated. The body mass index ((25.3 ± 3.0) kg/m² vs. (25.4 ± 3.0)kg/m², P = 0.852), image quality scores (4.70 ± 0.52 vs. 4.63 ± 0.59, P = 0.545), mean signal-to-noise ratios (22.2 ± 5.5 vs. 23.6 ± 5.8, P = 0.277), and contrast-to-noise ratios (35.6 ± 17.6 vs. 41.1 ± 17.6, P = 0.163) were similar between the control group and study group. Mean iodine loads were significantly reduced in the study group ((18.49 ± 0.75)g) compared to control group ((25.27 ± 0.94)g), P< 0.001). Mean effective radiation doses were also significantly reduced in the study group ((2.31 ± 0.73) mSv) compared to that in control group ((3.52 ± 1.16) mSv), P< 0.001). Use of low X-ray tube voltage and iterative reconstruction allows lower iodine load and effective radiation dose application at CCTA without image quality reduction.