In this paper, the methods of compensation of differences in the results of entire bending-fatigued fracture surface topographies were presented. The roughness evaluation was performed with a focus variation microscope and confocal surface topography measurement techniques. The differences in the ISO 25178 roughness parameters were investigated and procedures for their compensation were studied. It was found that various types of optical measurements can cause differences in the errors occurring in the measurement process, such as outliers, and noise. The reduction of differences in the various optical roughness measurements can be attained when measurement errors are compensated. For this study, the applications of general procedures available in commercial software can be suitable for improvements of the roughness measurement results, such as raw data thresholding technique, digital filtering (S-filter), power spectral density, and autocorrelation function analyses. The validation of measurement techniques was proposed for areal and profile studies, including analysis of differences in the calculation areal ISO 25178 roughness parameters.
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