Vacuum Ultraviolet Emission Research Articles

Enhancement of the continuous VUV emission of argon and xenon dimers in a supersonic expansion

The continuous vacuum ultra-violet (VUV) emission enhancement of argon (Ar2*) and xenon (Xe2*) is reported. In the case of Ar2* the spectral distribution o VUV radiation under the conditions of a negative voltage dc discharge with supersonic expansion was obtained. A gain of 2.77 cm−1 of the singlet excimer transition (~ 126nm) was measured in a multi-nozzle setup. In addition, strong emission of the Xe2* singlet state was also observed in a single supersonic nozzle, which was higher than the Ar2* emission, indicating a strong possibility of a laser operation in a novel multi-nozzle setup and a proper evacuating system.

Vacuum ultraviolet emission from hydrogen microwave plasmas driven by surface waves

The vacuum ultraviolet (VUV) radiation emitted by hydrogen surface-wave-driven plasmas operating at microwave frequency (2.45 GHz) and low-pressure conditions (0.1–2 mbar) was investigated, in particular the influence of microwave power and gas pressure on the intensity of the emissions. The strong emission of Lyman H2 and Werner H2 molecular bands in the 80–125 nm spectral range was detected, while the most intense atomic emissions observed correspond to Lyman-α and Lyman-β lines at 121.6 nm and 102.6 nm respectively. An increase of the atomic lines and molecular bands intensities with increasing microwave power at pressure 0.1 mbar was observed. At 2 mbar the VUV spectra are entirely dominated by molecular bands. Theoretical predictions, as obtained from a collisional-radiative model, were validated by the experimental results.

Quantitative Emission Spectroscopy for Superorbital Reentry in Expansion Tube X2

A superorbital reentry flow was realized in the X2 expansion tunnel of the Centre for Hypersonics of the University of Queensland, resulting in measurements of electronic excitation temperature, electron density, and particle densities of neutral and ionized atomic nitrogen and oxygen. A rectangular cold wall model was exposed to a flow corresponding to a flight equivalent velocity. Vacuum ultraviolet optical emission spectroscopy in the wavelength range between 116 and 185 nm was conducted through a window at the stagnation point. Spatially resolved optical emission spectroscopy of the stagnation streamline in the near-infrared wavelength range from 695 to 880 nm was conducted, analyzing the flow from the side. Population densities of excited atomic states, electronic excitation temperatures, and electron and ion densities were determined by analyzing the radiative transport in the flowfield. Additionally, the flowfield was numerically simulated using the code URANUS. Agreement in electron density () and electron temperature () in the equilibrium region is observed between the numerical simulations and the measurement. Significant differences between measurement and simulation in the distribution of the electron temperature at the shock are attributed to the modeling of the URANUS electron temperature.

Comparison of vacuum ultra-violet emission of Ar/CF4 and Ar/CF3I capacitively coupled plasmas

Spectra in the vacuum-ultra violet range (VUV, 30 nm–200 nm) as well as in the ultra-violet(UV) and visible ranges (UV+vis, 200 nm–800 nm) were measured from Ar/CF3I and Ar/CF4 discharges. The discharges were generated in an industrial 300 mm capacitively coupled plasma source with 27 MHz radio-frequency power. It was seen that the measured spectra were strongly modified. This is mainly due to absorption, especially by CF3I, and Ar self-trapping along the line of sight, towards the detector and in the plasma itself. The estimated unabsorbed VUV spectra were revealed from the spectra of mixtures with low fluorocarbon gas content by means of normalization with unabsorbed I* emission, at 206 nm, and CF band (1B1(0,v′,0)A1(0,,0)) emission between 230 nm and 430 nm. Absolute fluences of UV CF emission were derived using hybrid 1-dimensional (1D) particle-in-cell (PIC) Monte-Carlo (MC) model calculations. Absolute calibration of the VUV emission was performed using these calculated values from the model, which has never been done previously for real etch conditions in an industrial chamber. It was seen that the argon resonant lines play a significant role in the VUV spectra. These lines are dominant in the case of etching recipes close to the standard ones. The restored unabsorbed spectra confirm that replacement of conventional CF4 etchant gas with CF3I in low-k etching recipes leads to an increase in the overall VUV emission intensity. However, emission from Ar exhibited the most intense peaks. Damage to low-k SiCOH glasses by the estimated VUV was calculated for blanket samples with pristine k-value of 2.2. The calculations were then compared with Fourier transform infrared (FTIR) data for samples exposed to the similar experimental conditions in the same reactor. It was shown that Ar emission plays the most significant role in VUV-induced damage.

Vacuum ultraviolet spectral emission properties of Ga, In and Sn droplet-based laser produced plasmas

The Emission Spectra of gallium, indium and tin droplet-based laser produced plasmas are presented in the Vacuum Ultraviolet (VUV) emission range from 30nm to 160nm. The Ga ion transitions are investigated in detail as a function of background pressure level and laser irradiance. Different wavelength emission regions were detected according to the level of background gas. At short wavelengths (i.e. 30–50nm) the line emission from the higher charge states is reduced with increasing pressure, while at longer wavelengths (i.e. 100–160nm) the trend is inverted, as the plasma emission intensity of the lower charge states increases with higher background gas pressure level. The emitted lines are fitted with Voigt profiles to determine the electron density. The electron temperature is obtained from a fit based on the Planck distribution. These estimations are then used to identify the relevant processes that lead to the different charge state emissions as a function of background gas. Langmuir Probe measurements are also reported for evaluating the ion kinetic energy as a function of background gas. The gallium spectra are calibrated in units of spectral radiance, together with spectra from indium and tin. This calibration allows absolute power estimations from the light source in the VUV region. The presented experimental results are relevant as fundamental plasma emission spectroscopic measurements in an almost unexplored wavelength region as well as for applications such as Extreme Ultraviolet Lithography to determine the so-called Out-of-Band (OoB) radiation emission and for metrology applications for future inspection tools.

Photoionization capable, extreme and vacuum ultraviolet emission in developing low temperature plasmas in air

Experimental observation of photoionization capable extreme ultraviolet and vacuum ultraviolet emission from nanosecond timescale, developing low temperature plasmas (i.e. streamer discharges) in atmospheric air is presented. Applying short high voltage pulses enabled the observation of the onset of plasma formation exclusively by removing the external excitation before spark development was achieved. Contrary to the common assumption that radiative transitions from the b (Birge–Hopfield I) and b (Birge–Hopfield II) singlet states of N2 are the primary contributors to photoionization events, these results indicate that radiative transitions from the c (Carroll–Yoshino) singlet state of N2 are dominant in developing low temperature plasmas in air. In addition to c transitions, photoionization capable transitions from atomic and singly ionized atomic oxygen were also observed. The inclusion of c transitions into a statistical photoionization model coupled with a fluid model enabled streamer growth in the simulation of positive streamers.

Time-resolved vacuum-ultraviolet emission (λ = 60–120 nm) from a high pressure DBD-excited helium plasma: formation mechanisms of the fast component

We report time and wavelength resolved studies of the vacuum-ultraviolet (VUV) emission from a windowless dielectric barrier discharge (DBD) in helium. Short-pulse voltage excitation is utilised to clearly resolve the fast and slow temporal components of the Hopfield continuum between λ = 60–120 nm. Experimental results and theoretical modelling of the spectral distributions indicate that the two components of the VUV emission must originate from the same radiating molecular state—, and that two distinct pumping mechanisms populate this state. The time evolution of the fast component is found to correlate with that from the (0,0) molecular transition (λ = 513.4 nm). Thus the state is initially rapidly pumped via radiative cascade from higher molecular states. In addition, the observed band emissions from the molecular v=0 and v=0 states and the line emissions from the atomic He*(n = 3) states all exhibit similar temporal behaviour during the discharge excitation period. Our results are consistent with the recent report of Frost et al (J. Phys. B 34 1569 2001) concerning the existence of a so-called ‘neglected channel’ to fast production from He*(n = 3) atomic state precursors.

Time-discretized extreme and vacuum ultraviolet spectroscopy of spark discharges in air, N2 and O2

In this paper we present time-discretized spectra of spark discharges in air, N2 and O2. In previous work, a system for temporally resolved spectral analysis of extreme ultraviolet (EUV) and vacuum ultraviolet (VUV) emission from spark discharges was presented, along with some initial results. As was noted in this paper, statistical variances and the lacking of an apparatus sensitivity profile limited the usability of the data obtained. We have investigated the cause of these variances and improved the setup to reduce their effect. We also investigated the apparatus sensitivity profile to correct the intensity of measured lines. Newly obtained spectra in dry air, N2 and O2 are presented. Air and N2 show high emission in the vicinity of 100 nm, where direct photoionization of molecular oxygen is possible, in the first 250 ns of the discharge. We conclude this emission originates from nitrogen, which has several intense molecular transitions in this region. This finding is confirmed by our experimental results which show the emission in this region is much lower in oxygen.

Controlling the emission profile of an H2discharge lamp to simulate interstellar radiation fields

Context. Microwave discharge hydrogen-flow lamps have been used for more than half a century to simulate interstellar ultraviolet radiation fields in the laboratory. Recent discrepancies between identical measurements in different laboratories, as well as clear wavelength dependent results obtained in monochromatic (synchrotron) experiments, hint at a more elaborate dependence on the exact discharge settings than assumed so far.Aims. We have investigated systematically two lamp geometries in full dependence of a large number of different running conditions and the spectral emission patterns are characterized for the first time with fully calibrated absolute flux numbers.Methods. A sophisticated plasma lamp calibration set-up has been used to record the vacuum-ultraviolet emission spectra with a spectral resolution of 0.5 nm and bandwidth of 1.6 nm in the 116–220 nm region. Spectra are compared with the output of a calibrated D2 -lamp which allows a derivation of absolute radiance values.Results. The general findings of over 200 individual measurements are presented, illustrating how the lamp emission pattern depends on i) microwave power; ii) gas and gas mixing ratios; iii) discharge lamp geometry; iv) cavity positioning; and v) gas pressure.

Ion source research and development at University of Jyväskylä: Studies of different plasma processes and towards the higher beam intensities

Several ion source related research and development projects are in progress at the Department of Physics, University of Jyväskylä (JYFL). The work can be divided into investigation of the ion source plasma and development of ion sources, ion beams, and diagnostics. The investigation covers the Electron Cyclotron Resonance Ion Source (ECRIS) plasma instabilities, vacuum ultraviolet (VUV) and visible light emission, photon induced electron emission, and the development of plasma diagnostics. The ion source development covers the work performed for radiofrequency-driven negative ion source, RADIS, beam line upgrade of the JYFL 14 GHz ECRIS, and the development of a new room-temperature-magnet 18 GHz ECRIS, HIISI.

Vacuum ultra-violet emission of CF4 and CF3I containing plasmas and Their effect on low-k materials

CF3I was suggested as a replacement of CF4 gas to decrease the plasma-induced damage (PID) on low-k dielectrics during etching. This proposal is investigated by means of plasma emission measurements and material characterisation. The experiments were conducted in a 300 mm capacitively coupled plasma source. The vacuum ultraviolet (VUV, nm) plasma emission was measured for discharges generated in a pure or a mixture of argon, CF4 and/or CF3I, since VUV plays a major role in PID. However, CF3I containing discharges were found to have a stronger emission than CF4 in the VUV range. Nevertheless, Fourier transform infra-red spectroscopy and κ-value measurements showed that there is almost no difference between the damage caused by CF3I or CF4 containing plasmas, while etching in a capacitively coupled plasma source. It is proposed that the damage caused by CF3I with lower F*-density but higher VUV-photon flux is similar to the damage caused by CF4, with higher F*-density but lower VUV-photon flux.

Precise energy and temperature measurements in dielectric barrier discharges at atmospheric pressure

A specially designed dielectric barrier discharge (DBD) cell and associated equipment has been used to carry out precise measurements of electrical energy, , dissipated per discharge cycle of the applied ac voltage, Va over the frequency range 5 ⩽ ⩽ 50 kHz. Twin pairs of several different dielectric materials (2.54 cm diameter discs, thicknesses = 2.0 or ca. 0.1 mm) with relative permittivities between 2.1 ⩽ ⩽ 9.5 were used as dielectric barriers in DBDs of four different gases: He, Ne, Ar and N2. Much of the work relates to the study of atmospheric pressure glow discharge (APGD) plasma in flowing He gas; five separate thermometers (including fiber-optic probes immune to high voltage and high-frequency electromagnetic fields) have enabled us to perform a detailed calorimetric (heat balance) investigation in He APGD, believed to be the first of its kind. Fair agreement in the overall energy balance, which includes vacuum ultraviolet (VUV) light emission, lends strong support to the validity of both measurements and methodology. The latter includes refined algorithms that permit rapid data acquisition and processing. The present results are compared with literature, allowing several important conclusions/recommendations to emerge.

A metal-insulator-metal electron emitter based on a porous Al2O3 film

A metal-insulator-metal electron emitter containing a sandwiched insulator layer composed of porous aluminum oxide Al2O3 was fabricated. The electron emission characteristics of the electron emitter were investigated under vacuum and xenon. Treatment with H3PO4 and rapid thermal oxidation increased the electric field inside the insulator and improved the quality of porous Al2O3, resulting in higher efficiency and less fluctuation of electron emission. The maximum current and efficiency of electron emission reached 1.05 mA/cm2 and 51.2%, respectively, under a pressure of 1.0×10−4 Pa. In addition, electrons were injected into xenon and 147 nm vacuum ultraviolet emission was detected in xenon at a pressure of 5.0 × 102 Pa. This electron emitter has a great potential for use as an ultraviolet radiation source.

Surface analysis by photo-stimulated desorption using tunable VUV radiation

We have demonstrated the photon-stimulated surface spectroscopy using broadband vacuum ultraviolet (VUV) emissions from a laser-produced plasma, in which adsorbed atoms or molecules on material surfaces were to be desorbed and dissociated as a result of absorption of the wavelength-selected VUV photons. Desorbed and dissociated atoms or molecules were then detected by a mass spectrometer. Mass spectra of polyethylene and polyvinyl chloride samples were obtained as a function of the irradiation wavelength. We have found sufficient characteristic differences of the mass spectra in the irradiation wavelength shorter than 200 nm in each sample. The desorption and dissociation of atoms or molecules from material surfaces depended on bond energy or molecular structure.

Nitrogen Shielding of an Argon Plasma Jet and Its Effects on Human Immune Cells

Atmospheric pressure plasmas are widely used in research for biomedical or clinical applications. Reactive oxygen species and reactive nitrogen species (RNS) produced by plasmas are thought to be of major significance in plasma-cell interactions. Different applications, however, may demand for different plasma properties. Tailoring plasma devices by modulating the supply gas or the surrounding is a suitable way to alter reactive species composition, vacuum ultra violet emission, or temperature. Treatment regimens involving availability of oxygen or humidity may lead to increased hydrogen peroxide deposition in liquids and thus will be toxic to cells. Using an atmospheric pressure argon plasma jet, we applied a nitrogen gas curtain to its visible effluent during treatment of human immune cells. The curtain deprived the plasma of molecular oxygen. This excluded gas-phase oxygen plasma chemistry and led to generation of highly energetic metastables. Planar laser-induced fluorescence spectroscopy verified laminar gas flow and complete elimination of surrounding air by the gas curtain. We used human immune cells to monitor cytotoxic effects as they are highly relevant in potential clinical plasma applications, e.g., treatment of chronic wounds. Air curtain plasma treatment led to significantly higher cytotoxicity compared with nitrogen curtain plasma treatment. Scavenging of hydrogen peroxide abrogated cell death in both gas curtain conditions. This indicated a negligible contribution of highly energetic metastables or increased gas temperature to cytotoxicity. Finally, the results suggested an oxygen-independent generation of hydrogen peroxide pointing to an indirect role of UV or RNS in plasma-mediated cytotoxicity.

NIR to VUV: Seven-Photon Upconversion Emissions from Gd(3+) Ions in Fluoride Nanocrystals.

Here we show that a near-infrared (NIR) diode laser is capable of generating vacuum ultraviolet (VUV) emissions in fluoride nanocrystals through photon upconversion (UC) processes. By using Yb(3+) and Tm(3+) as sensitizers, we successfully obtained the VUV photons with the energy exceeding 6 eV in YF3: Yb, Tm, and Gd nanocrystals. The seven photon UC fluorescence from the (6)GJ → (8)S7/2 transitions of Gd(3+) ions and the possible VUV UC mechanism were reported along with the calculation of the branching ratio under different pumping power excitation. Practically, it offers a promising solution for VUV light generation without cryogens and expensive instrumentations. Fundamentally, the extremely high-order UC processes will intrigue great interest in exploring unusual high-energy radiative transitions in rare earth ions.

Intense vacuum ultraviolet and infrared scintillation of liquid Ar-Xe mixtures

Vacuum ultraviolet light emission from xenon-doped liquid argon is described in the context of liquid noble gas particle detectors. Xenon concentrations in liquid argon from 0.1 ppm to 1000 ppm were studied. The energy transfer from the second excimer continuum of argon to the second excimer continuum of xenon is observed by recording optical emission spectra. The transfer almost saturates at a xenon concentration of for which, in addition, an intense emission in the infrared at a peak wavelength of with photons per MeV deposited by electrons had been found. The corresponding value for the VUV emission at a peak wavelength of 174 nm (second excimer continuum of xenon) is determined to be photons per MeV electron energy deposited. Under these excitation conditions pure liquid argon emits photons per MeV electron energy deposited at a peak wavelength of 127 nm. An electron-beam–induced emission spectrum for the 10 ppm Ar-Xe liquid mixture ranging from 115 nm to is presented. VUV emission spectra from xenon-doped liquid argon with exponentially varied xenon concentrations from 0.1 ppm to 1000 ppm are also shown. Time structure measurements of the light emissions at well-defined wavelength positions in the vacuum ultraviolet as well as in the near-infrared are presented.

Comparison of surface vacuum ultraviolet emissions with resonance level number densities. II. Rare-gas plasmas and Ar-molecular gas mixtures

Vacuum ultraviolet (VUV) emissions from excited plasma species can play a variety of roles in processing plasmas, including damaging the surface properties of materials used in semiconductor processing. Depending on their wavelength, VUV photons can easily transmit thin upper dielectric layers and affect the electrical characteristics of the devices. Despite their importance, measuring VUV fluxes is complicated by the fact that few materials transmit at VUV wavelengths, and both detectors and windows are easily damaged by plasma exposure. The authors have previously reported on measuring VUV fluxes in pure argon plasmas by monitoring the concentrations of Ar(3p54s) resonance atoms that produce the VUV emissions using noninvasive optical emission spectroscopy in the visible/near-infrared wavelength range [Boffard et al., J. Vac. Sci. Technol., A 32, 021304 (2014)]. Here, the authors extend this technique to other rare-gases (Ne, Kr, and Xe) and argon-molecular gas plasmas (Ar/H2, Ar/O2, and Ar/N2). Results of a model for VUV emissions that couples radiation trapping and the measured rare-gas resonance level densities are compared to measurements made with both a calibrated VUV photodiode and a sodium salicylate fluorescence detection scheme. In these more complicated gas mixtures, VUV emissions from a variety of sources beyond the principal resonance levels of the rare gases are found to contribute to the total VUV flux.

Luminescence properties of an orange-red phosphor GdAl3(BO3)4:Sm3+ under VUV excitation and energy transfer from Gd3+ to Sm3+

In order to develop a new warm-color emission phosphor under vacuum ultraviolet (VUV) excitation, trivalent samarium ion (Sm3+) doped GdAl3(BO3)4 was prepared by a solid state reaction technique at high temperature. The VUV excitation and emission spectra of as-synthesized sample GdAl3(BO3)4:Sm3+ were determined in the Beijing Synchrotron Radiation Facilities (BSRF). Compared with the emission of GdAl3(BO3)4:Eu3+, GdAl3(BO3)4:Sm3+ shows an orange-red emission under Xe 172nm VUV excitation, which indicates that Sm3+ ion can be a possible activator to obtain warm color emission in the field of lighting. Furthermore, for improving the emission of Sm3+ doped in GdAl3(BO3)4, the energy transfer process from Gd3+ in the host to the activator Sm3+ was investigated through the analysis of spectroscopic characteristics and luminescence decay curves of GdAl3(BO3)4:Sm3+. The results reveal that there exists energy transfer from Gd3+ to Sm3+, but the energy transfer from Sm3+ to Gd3+ is inefficient.

Optical and luminescence characterization of LiBaAlF6 single crystals

Far ultraviolet optical, luminescence excitation and pulse cathodoluminescence spectroscopy methods were used to determine the electronic structure properties of undoped single crystals of LiBaAlF6 (LBAF). The spectrum of the refraction index in the ultraviolet–visible range was recorded. The photoluminescence excitation spectroscopy was carried out for both the excitonic (4.3eV) and fast vacuum ultraviolet (6.6eV) emission bands of LBAF single crystals at 10K. Modeling of the photoluminescence excitation spectra for excitonic emission was performed to characterize the low-energy tail of the host absorption of LBAF single crystals. The pulse cathodoluminescence spectroscopy method was used to characterize the fast vacuum ultraviolet (6.6eV) emission band and proof its origination from the radiative core-valence transitions F− 2p→ Ba2+ 5p.