The balance is one of the earliest measuring instruments of mankind. The oldest balance beam, found in Upper Egypt and exhibited in the Petrie Museum in London, is attributed to the Amratic period (Negade II) B. C. 3000. A wall painting of a standardisation table containing two balance beams and sets of weights and cups was discovered in the tomb of Hesi-re near the Saqqarah pyramids and can be dated rather exactly to B.C. 2650. The history of vacuum techniques, beginning with Evangelista Torricelli and Otto von Guericke covers about 370 years. First in 1861 a kilogram vacuum balance was constructed by Delieul in order to define the mass standards of the newly introduced metric system excluding buoyancy. However, experiments of Henri Victor Regnault were to no avail because of sorption effects. Thermogravimetric techniques were first applied to determine the water content of raw silk in 1833 by Talabot at Lyon. The first vacuum microbalances, already with electromagnetic force compensation, are from G. Urbain and Friedrich Emich, presented both in 1912. Emich constructed also the first helical spring vacuum balance. Propositions for further improvements of vacuum microbalances were developments in the field of electronics, magnetic materials and high-vacuum techniques. Following this an increasing interest in microgravimetry was developed by investigations of the reaction of solids with the gas phase (adsorption, desorption, chemisorption, heterogeneous catalysis) and some analytical methods such as thermogravimetry, surface structure analysis by adsorption, density determination, the measurement of surface tension and of the magnetic susceptibility. Thus, during the 1950s and 1960s many sorption and thermomicrobalances were developed: spring balances, electronic compensating beam balances, magnetic suspension balances and quartz resonators. It was not only necessary to adapt the balance to the vacuum technique, but the vacuum apparatus had also to be modified for the requirements of the incorporated highly sensitive force transducer. Many disturbances (mechanical vibrations, thermally induced
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