Ferromagnetism is induced in pure TiO2 single crystals by oxygen ion irradiation. The ferromagnetism is observed up to room temperature and is with weak temperature dependence. By combining X-ray diffraction, Rutherford backscattering/channelling, Raman scattering, and electron-spin resonance spectroscopy, supperconducting quantum interference device, displacement per atom, we measured the lattice damage accumulation with increasing fluences. A defect complex, i.e., Ti3+ on the substitutional accompanied by oxygen vacancies, has been identified in the irradiated TiO2. This kind of defect complex results in a local (TiO6−x) stretching Raman mode. We elucidate that Ti3+ with one unpaired 3d electron provide the local magnetic moments.
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