The manuscript proposes a novel dielectrically modulated Non-Uniform Tunnel FET based Biosensor for the detection of charged and neutral biomolecules. In this work, the reliability analysis of Dual Material Source based Non-Uniform Tunnel FET Biosensor has been performed. The design of Non-Uniform Tunnel FET and doping profile at the tunneling junction is accountable for the improved sensitivity. The response of the proposed biosensor has been analysed in terms of threshold voltage sensitivity, ON-OFF current ratio sensitivity and drain current sensitivity by using Sentaurus TCAD device simulator. The investigation includes analysis of neutral, positive and negatively charged Bio-analytes at immobilization layer for different cases of dielectrics. In case of positively charged Bio-analytes, it has been observed that the proposed biosensor can obtain the highest sensitivities of 100 mV, 7.9 × 106, 451 for threshold voltage, ON-OFF current ratio, and drain current sensitivities, respectively. Furthermore, the performance and reliability assessment of the biosensor have been considered using the appearance of steric hindrance in different patterns and temperature fluctuations in the wide range from 200 K to 400 K.
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