Nanostructure processing by a laser illuminating cantilevered scanning near-field optical microscopy (SNOM) tip is a novel technology that has received extensive attention from researchers. In this paper, theoretical investigations of the mechanism for nanostructure fabrication on Au and Ag nano-film by this technology are realized by the finite element method. The light field intensity and temperature distribution on Au and Ag surfaces at the near-field of the SNOM tip apex after illumination is simulated. The results reveal that the laser is restricted and enhanced within the SNOM tip aperture during illumination. Locally excited surface plasmon polaritons, which induce near-field enhancement on the Au and Ag nano-film at the vicinity of the aperture, are significant for nanostructure fabrication. The impacts of several parameters such as aperture width w, gap between the apex and substrate g, and the initial electric field intensity |E0| of the laser on the temperature of the Au and Ag substrate surfaces during fabrication are deeply studied. It reveals that the surface temperature depends on both the enhancement of the light field intensity and the transmitted laser. The enhancement is dominant in affecting temperature when the gap is small, while the transmittance becomes the main factor influencing the surface temperature with the increase of the gap.
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