We have studied grain growth and the development of preferred orientation in thin gold films using transmission electron microscopy conical dark field imaging. The technique is capable of detecting texture variations characterized by mean orientation differences smaller than 5°. We have observed microscopic regions with distinct 〈111〉 fiber textures that differ, primarily, in the mean azimuthal deviation from the fiber axis. For one texture, the 〈111〉 axes of individual grains are found to have an average deviation of 1.5° from the foil normal, a second is characterized by a mean deviation of 5°, and a third is more nearly random with only a slight 〈111〉 orientation preference. The shapes of the differently oriented regions depend on the preparation of the sodium chloride substrate before deposition. We have studied the dependence of preferential orientation development on substrate surface topography and the evolution of microstructure in differently textured regions. Hillock growth, observed only in nearly randomly oriented regions of the films, cannot be explained by current theories of grain growth or hillock formation.
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