This paper presents the surface modification and charge transportation mechanism of thin polyimide films. Here, we demonstrate that the surface modification of these films, by using the fluorine gas-phase, improves the charges mitigation and, thereafter, suppress the space charges. The experimental results indicate that the thermal step current for fluorine coated films reduce significantly in comparison to pure polyimide films. The thin layer of fluorine coating helps to release the surface charge, reduce the charge injection from the electrode, provide hindrance for charges to penetrate into the bulk of the films and the higher degree of charge disappearing helps to reduce the space charge growth.
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