We process a silicon-on-insulator substrate into a funnel with a 25-μm-side square-shaped outlet by photolithography and anisotropic chemical etching. The funnel is utilized to form a cold atomic beam by means of reflection and cooling on repulsive evanescent light. Monte Carlo simulations show that the flux intensity of emitted cold Rb atoms reaches 10 12 cm −2 s −1. The mean horizontal velocity is estimated to be below 10 cm/s, while the mean vertical velocity decreases in proportion to the outlet side. The evanescent-light funnel can be developed to concentrate 80% of Rb atoms falling from a standard magneto-optical trap.
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