We have grown thin films of Co2TiSi (CTS) Heusler alloy on n-type Si (100) at different substrate temperatures by electron beam evaporator under a high vacuum. The structural, magnetic, and electric characterizations were carried out and found a strong correlation between the properties and the growth temperatures of the samples. The crystallinity and magnetic moment both were significantly improved with increasing growth temperatures from room temperature to 400 °C. The saturation magnetization of 1.85 µB at 10 K is close to the theoretical Slater–Pauling value. A large value of spin wave stiffness constant ( D = 7.2 meV- nm2) of CTS film manifests the robustness of magnetization. The temperature-dependent longitudinal resistivity demonstrated different scattering phenomenon like weak localization, electron-magnon, electron-election, and electron-phonon interactions. A decrease in residual resistivity (109–49 µΩ-cm) and an increase in residual resistivity ratio (1.2–1.39) indicate an enhancement of crystallinity and structural order of CTS films. By first principle study using DFT calculation we have analyzed the effect of atomic site disorder on electronic properties of both bulk and thin film (220) surface form of CTS Heusler alloy. It has been noticed that the ordered bulk structure shows perfect half-metallic nature but for thin film the spin polarization and moment both are deviated from identical value. The spin polarization and magnetic moment both are reduced a lot by introducing atomic site disorder in L21 ordered structure.
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