A rutile CoxTi1−xO2−δ (100) film was heteroepitaxially grown on GaN (0001) by pulsed laser deposition. Magneto-optical Kerr effect and cross-sectional transmission electron microscope (TEM) measurements revealed that Co0.03Ti0.97O2−δ films prepared at an oxygen partial pressure of 10−6–10−5Torr with a carrier density ne⩾3×1018cm−3 exhibit room-temperature ferromagnetism without any precipitates or secondary phase. High-resolution TEM observations confirmed that the interface between CoxTi1−xO2−δ and GaN is atomically smooth without intermixing. These results lead us to conclude that CoxTi1−xO2−δ is promising as a spin injector in GaN-based spin-electronic devices.
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