The distribution of the hyperfine fields or the resonance frequencies in metals and alloys obtained by NMR measurements have been known for a long time. Recently, new experimental data have been published about thin films for studying their chemical inhomogeneities. An example is the study on sputtered and evaporated Co-Cr layers. In this paper we report on the compositional distribution of co-evaporated Co-Cr films by using the Co spin-echo NMR technique. For comparison single source evaporated samples of Co-Cr and pure Co as well as two alloyed ribbons (“bulk” samples) have also been measured. Based on the NMR results the local Cr concentration of the ferromagnetic and less ferromagnetic regions are determined. In comparison the data from the co-evaporated films, even at low substrate temperature, have clearly shown the presence of a process-induced compositional separation. This is in qualitative agreement with the magnetic properties of the samples.
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