Vacuum deposited thin-film sensors have been developed for monitoring wear and temperature in a variety of bearing applications. The sensor typically consists of one or more metallic or insulator films. This lamination sputtered thin-film resistance elements and thermoelectric elements with appropriate insulators is deposited directly on the bearing surface. The thin-film package can be designed to have wear behavior similar to that of the bearing materials, and to have a small surface area that conforms to the bearing contour. The wear sensor monitors the regression of the surface, i.e. the loss of material due to wear, in the range 0.1–10 μm (or more) over the small area that the sensor occupies. The thermoelectric sensor monitors local temperature. The effect of the materials and fabrication on the properties of the sensors are described as they effect the electrical response and the wear characteristics. Desired properties needed by the conducting film component include adequate electrical conductivity, adhesion to the insulating layers, low ductility, adequate toughness, and hardness. The critical properties of the insulating film component were found to be adhesion, low conductivity, strength, and hardness. Test results were obtained for sliding ring and block tests in both air and oil-lubricated environments. For conducting films, aluminum, platinum, tantalum, and type K + and K − thermoelectric alloys were studied and are reported here. Copper and two metal silicides were also evaluated. For insulating films, results on aluminum oxide, tantalum oxide, and borosilicate glass are reported. The substrate block material was 304 stainless steel. It was found that the electrical performance of the conducting films in the sensor package can be described using a simple electrical resistance model.
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