Organic-inorganic hybrid silica materials, incorporating an organic group bridging two silicon atoms, have demonstrated great potential in creating membranes with excellent permselectivity. Yet, the large-scale production of polymer-supported flexible hybrid silica membranes has remained a significant challenge. In this study, we present an easy and scalable approach for fabricating these membranes. By employing a sol-gel ultrasonic spray process with a single-pass method, we deposited a thin and uniform hybrid active layer onto a porous polymer substrate. We first optimized the deposition conditions, including substrate temperature, the binary solvent ratio of the silica sol, and various ultrasonic spray parameters. The resulting flexible hybrid silica membranes exhibited exceptional dehydration performance for isopropanol (IPA)/water solutions (IPA: 90 wt%) in the pervaporation process, achieving a water flux of 0.6 kg/(m2 h) and a separation factor of around 1300. This work demonstrates that the single-pass ultrasonic spray method is an effective strategy for the large-scale production of polymer-supported flexible hybrid silica membranes.
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